Sputtering equipment - Anelva L-430S-FH
Product Specifications
Maker Anelva
Model L-430S-FH
Model year 1999
External Dimensions
Showroom Information
Exhibition hall Enzan Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number N20560
Mechanical Specifications
Cathode: φ4 inch x 3 units
Sputtering method: Radio frequency (RF) 1.2kW / Direct current (DC) 2.5kW
Substrate heating: Max250℃
Input power: 3φ AC200V 50/60Hz 75A
Attachments
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