Ion milling equipment - ULVAC IML-580
Product Specifications
Maker ULVAC
Model IML-580
Model year
External Dimensions W2200 D2000 H1900
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number O60688
Mechanical Specifications
Ion beam density: Max. 1.0mA/cm2
Ion beam energy: 300eV-1.000eV
Packet type Electrode effective diameter: Approx. φ580
Material: Molybdenum
【filament】
For ion source: Tungsten (W)
For neutralizer: Tantalum (Ta)
Acceleration voltage current: 1KVmax 2.68A
Ion species: Argon (Ar)
Electrode effective diameter: Approx. φ580
Board holder: φ100X8 pieces (rotating and revolving holder)
3φ200V ±10% 50/60Hz
Attachments
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