Cryopump - ULVAC CRYO-U6H
Product Specifications
Maker ULVAC
Model CRYO-U6H
Model year
External Dimensions Φ235 H520
Showroom Information
Exhibition hall Enzan Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number Q10474
Mechanical Specifications
*Special specification (with air intake on the side)
Ultimate pressure: 10-7Pa
Intake: VG150
Compatible compressors: C10, C10AT, C10ES
Attachments
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