Dry etching equipment (high density) - Anelva L-310R-E
Product Specifications
Maker Anelva
Model L-310R-E
Category Semiconductor (Pre-process)
Model year 1999
Condition Used
Showroom Information
Exhibition hall Enzan Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number F42708
Mechanical Specifications
ECR Source Type
Document size 100mm (irregular shape) batch type
Etching performance: 80mm/min or more
Accuracy: 5% within Φ80mm (for SiO2)
Attachments
Product Overview
Anelva L-310R-E is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Anelva) and the same category (Semiconductor (Pre-process)).
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