Dry etching equipment (high density) - Anelva L-310R-E
Product Specifications
Maker Anelva
Model L-310R-E
Category Semiconductor (Pre-process)
Model year 1999
Condition Used
Showroom Information
Exhibition hall Enzan Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number F42708
Product Overview
Anelva L-310R-E is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. It is kept in stock at our Enzan Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (Anelva) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
ECR Source Type
Document size 100mm (irregular shape) batch type
Etching performance: 80mm/min or more
Accuracy: 5% within Φ80mm (for SiO2)
Attachments
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