CVD equipment Plasma CVD - Anelva L-301P
Product Specifications
Maker Anelva
Model L-301P
Category Semiconductor (Pre-process)
Model year 1999
Condition Used
Showroom Information
Exhibition hall Tsuru Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number GC0127
Product Overview
Anelva L-301P is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. It is kept in stock at our Tsuru Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (Anelva) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
1/5 (Main unit L-301P, power supply 3-phase 200V 50A 50/60Hz, water flow rate 0.3MPa 6L/min, air pressure 0.6MPa, mass 0.7t, external dimensions W1330 D1290 H1820 S/N.EVP-34021) 2/5 (Valve box external dimensions W1085 D690 H1630) 3/5 (Turbo molecular pump Osaka Vacuum TC440, flange external diameter Φ235mm, weight approx. 60kg S/N.S440-695) 4/5 (Rotary pump Alcatel 2033 C2, pumping speed 450/533L/min, ultimate pressure 3×10?1Pa, motor output 1.5kw, oil capacity 3.6LS/N.349357) 5/5 (Oil filter unit Anelva CLN-101M Input 100V 0.8A Single phase 50/60Hz External dimensions W340 D440 H425 S/N.R90113
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