CVD equipment Plasma CVD - Anelva L-301P
Product Specifications
Maker Anelva
Model L-301P
Category Semiconductor (Pre-process)
Model year 1999
Condition Used
Showroom Information
Exhibition hall Tsuru Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number GC0127
Mechanical Specifications
1/5 (Main unit L-301P, power supply 3-phase 200V 50A 50/60Hz, water flow rate 0.3MPa 6L/min, air pressure 0.6MPa, mass 0.7t, external dimensions W1330 D1290 H1820 S/N.EVP-34021) 2/5 (Valve box external dimensions W1085 D690 H1630) 3/5 (Turbo molecular pump Osaka Vacuum TC440, flange external diameter Φ235mm, weight approx. 60kg S/N.S440-695) 4/5 (Rotary pump Alcatel 2033 C2, pumping speed 450/533L/min, ultimate pressure 3×10?1Pa, motor output 1.5kw, oil capacity 3.6LS/N.349357) 5/5 (Oil filter unit Anelva CLN-101M Input 100V 0.8A Single phase 50/60Hz External dimensions W340 D440 H425 S/N.R90113
Attachments
Product Overview
Anelva L-301P is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Anelva) and the same category (Semiconductor (Pre-process)).
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