Dry Etching Equipment - Tokyo Ohka Kogyo TCE-3822
Product Specifications
Maker Tokyo Ohka Kogyo
Model TCE-3822
Category Semiconductor (Pre-process)
Model year 2011
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number H60706
Product Overview
Tokyo Ohka Kogyo TCE-3822 is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. It is kept in stock at our Kyushu Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (Tokyo Ohka Kogyo) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
Serial number T-1109735
Power supply: 3-phase 200V 125A 60Hz 1/2: Etching equipment main unit Φ125 wafer compatible quartz chamber x 2 2/2: Control rack KYOSAN matching controller (MAK5) 1KW RF power supply Water leak detector (WR-NA)
Pump not included W1000 D1850 H2030, Power supply W600 D1000 H1200
*A cassette transport cover not included
*PC board is not working (repair or replacement required)
Attachments
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