Sputtering equipment - Anelva L-430S-FHL
Product Specifications
Maker Anelva
Model L-430S-FHL
Category Semiconductor (Pre-process)
Model year 1999
External Dimensions W2630D950H1850
Condition Used
Showroom Information
Exhibition hall Enzan Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number H80246
Mechanical Specifications
Target size: φ4 inches, Number of targets: 3
Board size: 150mm,
Sputtering power supply: RF/DC power supply,
Substrate heating performance: Maximum temperature 300℃
Device size: W2630D950H1850
Three phase 200V 100A 50/60Hz
Water volume: 0.25 MPa 6.0 m3/min
Target 0.25MPa 3.0m3/min Air pressure 0.5~0.8MPa
Mass 1.2t External dimensions W2440 D1100 H1600
Controller box external dimensions W590 D1010 H1850 Power box ② external dimensions W560 D700 H1780
Cryo Compressor CR420 Three-Phase 200V 50/60Hz 2.4/2.5? Serial Number 2299022B
Rotary Pump Alcatel 2033 SD Serial 348451
Attachments
Product Overview
Anelva L-430S-FHL is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. External dimensions: W2630D950H1850. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Anelva) and the same category (Semiconductor (Pre-process)).
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