Sputtering equipment (CtoC) Single wafer type - Anelva C-7960FL
Product Specifications
Maker Anelva
Model C-7960FL
Category Semiconductor (Pre-process)
Model year 1998
Condition Used
Showroom Information
Exhibition hall Enzan Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number HB1176
Product Overview
Anelva C-7960FL is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. It is kept in stock at our Enzan Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (Anelva) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
Target size: φ318×4t, Number of targets: 4
Board size: 6 inches, Number of boards that can be mounted: 7
Sputtering power supply: RF power supply 5kw
This equipment is a single-wafer automatic coating equipment.
Vacuum performance 1. Sputtering chamber ultimate pressure 8x10??Pa or less
2. Transfer chamber ultimate pressure 9.9x10??Pa or less
3. Load lock chamber ultimate pressure 9.9x10??Pa or less
Attachments
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