Dry Etching Equipment - Tokyo Ohka Kogyo TCE-3822
Product Specifications
Maker Tokyo Ohka Kogyo
Model TCE-3822
Category Semiconductor (Pre-process)
Model year 2011
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number I70528
Product Overview
Tokyo Ohka Kogyo TCE-3822 is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. It is kept in stock at our Kyushu Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (Tokyo Ohka Kogyo) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
Serial number T-1109732
Power supply: 3 phase 200V 125A 60Hz
1/2: Etching equipment body, compatible with Φ125 wafers, 2 quartz chambers
2/2: Control rack KYOSAN matching controller (MAK5) 1KW RF power supply Water leak detector (WR-NA)
Dry pump sold separately
*PC board not working (repair or replacement required)
Attachments
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