Dry Etching Equipment - Tokyo Ohka Kogyo TCE-3822
Product Specifications
Maker Tokyo Ohka Kogyo
Model TCE-3822
Category Semiconductor (Pre-process)
Model year 2011
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number I70529
Mechanical Specifications
Serial number T-1107725
Power supply: 3-phase 200V 125A 60Hz
1/2: Etching equipment body, compatible with Φ125 wafers, 2 quartz chambers
2/2: Control rack KYOSAN matching controller (MAK5) 1KW RF power supply Water leak detector (WR-NA)
Dry pump not included
* RF power supply NG (repair or replacement required)
Attachments
Product Overview
Tokyo Ohka Kogyo TCE-3822 is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Tokyo Ohka Kogyo) and the same category (Semiconductor (Pre-process)).
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