Dry Etching Equipment - Showa Vacuum SPE-2010
Product Specifications
Maker Showa Vacuum
Model SPE-2010
Category Semiconductor (Pre-process)
Model year 2001
External Dimensions W1000D1100H1600
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number I70641
Product Overview
Showa Vacuum SPE-2010 is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. External dimensions: W1000D1100H1600. It is kept in stock at our Kyushu Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (Showa Vacuum) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
1/4 Etching Equipment (SPE-2010): Power supply: 3-phase 200V 50/60Hz 12KVA, compressed air 0.5MPa 20L/min, N2 gas 0.3MPa/min, 3-inch compatible, ultimate pressure 2.7x10?3Pa, exhaust time to 3.0x10?2Pa within 2 minutes, etching depth 60nm
External dimensions: W1000D1100H1600 Weight: 1000kg
2/4 Chiller: NESLAB M75 3/4 Rotary Pump: ALCATEL2012A/2033 C2 (2 units) 4/4 RF Power Supply (T857-2) MAX 500W 13.56MHz
Attachments
※ Click on the image below to zoom in.
