Evaporation apparatus (EB) - Showa Vacuum SEC-16CMCⅢ
Product Specifications
Maker Showa Vacuum
Model SEC-16CMCⅢ
Category Semiconductor (Pre-process)
Model year -
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number I70652
Product Overview
Showa Vacuum SEC-16CMCⅢ is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. It is kept in stock at our Kyushu Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (Showa Vacuum) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
Power: Main unit 3-phase 200V 22KVA EB power supply 3-phase 200V 26KVA Ultimate pressure 5.0×-7 Torr range Exhaust time 10 minutes or less to 3.0×10-5 Torr Substrate heating MAX 300℃ Regular use 200℃ Chamber Φ750×900H External dimensions Main unit: W1960D1270H1830 1300kg Control panel: W565D1020H1900 EB power supply: W660D1050H1200 440kg
Attachments
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