Dry Etching Equipment (ICP) - ULVAC NE-730
Product Specifications
Maker ULVAC
Model NE-730
Category Parts Related
Model year 2001
Condition Used
Showroom Information
Exhibition hall etc
Price & Inquiry
price Price Inquiry
Inquiry Number J70483
Mechanical Specifications
External dimensions: W1800, D1400, H1650, Weight: 1200kg
Control external dimensions: W700 D1100 H2250 (2000 without patrol)
TMP: Shimadzu 800L, RF power supply: 2 units (200W, 500W)
Chiller: 1 unit (RISSHI CS-400SW-L)
Dry pump: 3 units
Breakdown: Kashiyama SD60VⅡ (1 unit), HC60B-1 (2 units)
Attachments
Product Overview
ULVAC NE-730 is a used Parts Related item handled by ASKINDEX Korea. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (ULVAC) and the same category (Parts Related).
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