CVD equipment Silicon oxide film - Samco PD-200STP
Product Specifications
Maker Samco
Model PD-200STP
Category Semiconductor (Pre-process)
Model year 2010
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number J70540
Product Overview
Samco PD-200STP is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. It is kept in stock at our Kyushu Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (Samco) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
TEOS CVD
Power supply: 3 phase 200V 50A
Power supply: Single phase 200V 40A
Frequency: 50Hz *Operation confirmed at 60Hz
Body W1370 D1800 H2000 1000kg
Mechanical Booster Pump W430 D704 H880 150kg
Rotary Pump D170 W519 H253 30kg
Oil Filtration W250 D250 H460 20Kg
Decontamination cabinet W600 D600 H1500 50kg
TEOS sauce tank 2L
Applicable substrate size: Maximum Φ6 inch wafer processing
Attachments
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