Vertical annealing furnace (vacuum) - DSI MA-200V
Product Specifications
Maker DSI
Model MA-200V
Category Semiconductor (Pre-process)
Model year 2010年4月
External Dimensions (本体)W1750,D1300,H2150
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number JC0374
Machine specifications
Power supply (for electric furnace): 3-phase 200V 50/60Hz 18kVA
(For control) Single-phase 100V 50/60Hz 2kVA
Supply gas: H2, N2, HP-GAS
Maximum operating temperature 600℃
Regular use temperature 300℃~500℃
Substrate size: 6-inch wafer or equivalent substrate
Processing volume: 16 sheets (25 sheets including dummy sheets)
(Power supply box) W710, D420, H900
(Dry pump) W300, D750, H900
* PLC Passcode unknown; data cannot be extracted.
(Spare quartz parts) Tubes, stages, boats, thermocouple protection tubes
Attached file
Product Overview
DSI MA-200V is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. External dimensions: (本体)W1750,D1300,H2150. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (DSI) and the same category (Semiconductor (Pre-process)).
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