Dry etching equipment (high density) - ULVAC NE-730
Product Specifications
Maker ULVAC
Model NE-730
Category Semiconductor (Pre-process)
Model year 2002
External Dimensions (本体)1700 x1300 xH1600
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number K30154
Product Overview
ULVAC NE-730 is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. External dimensions: (本体)1700 x1300 xH1600. It is kept in stock at our Kyushu Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (ULVAC) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
Board size: Φ8 inches
【gas】
O2,Ar:：100SCCM each
CHF3, C4F8, CF4: 50SCCM each
[Power supply]: ANTRNNA:RF500W, BIAS:RF200W
[Batch/Single-wafer]: Load lock type
[Board holding method]: Mechanical chuck
【accessories】
・Exhaust gas treatment equipment
・Dry pump PDR-060C x 2
・Chiller RISSHI CS-400SW
Attachments
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