Dry etching equipment (high density) - ULVAC NE-730
Product Specifications
Maker ULVAC
Model NE-730
Category Semiconductor (Pre-process)
Model year 2002
External Dimensions (本体)1700 x1300 xH1600
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number K30154
Mechanical Specifications
Board size: Φ8 inches
【gas】
O2,Ar:：100SCCM each
CHF3, C4F8, CF4: 50SCCM each
[Power supply]: ANTRNNA:RF500W, BIAS:RF200W
[Batch/Single-wafer]: Load lock type
[Board holding method]: Mechanical chuck
【accessories】
・Exhaust gas treatment equipment
・Dry pump PDR-060C x 2
・Chiller RISSHI CS-400SW
Attachments
Product Overview
ULVAC NE-730 is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. External dimensions: (本体)1700 x1300 xH1600. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (ULVAC) and the same category (Semiconductor (Pre-process)).
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