Resist Coating Equipment - Dainippon Screen SC-80EX
Product Specifications
Maker Dainippon Screen
Model SC-80EX
Category Semiconductor (Post-process)
Model year 2017
External Dimensions 1520x2570x2600
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number K50713
Mechanical Specifications
Wafer 6 inch 8 inch
Cassette 6.35mm pitch x 25 rows (8 inch) 4.76mm pitch x 25 rows (6 inch)
Conveyance accuracy: ±0.15mm or less
Indexer ID-A (side loading, non-adsorption type)
Resist system Nozzle independent movement PT pump
Resist nozzles: Up to four nozzles can be installed. Temperature can be controlled independently up to the tip.
Spin motor rotation speed: -990 to 6000 rpm
Chemical Solution LA900 (900cp) Tokyo Ohka
Rinse type 1 system OK73 thinner
Hot plate proximity heating 20-250℃
Cooling Plate Proximity Cooling 20-25℃
Temperature control unit: Electronic cooling and heating 21 to 25°C ±3°C (in 0.1°C increments)
Specifications available
Attachments
Product Overview
Dainippon Screen SC-80EX is a used Semiconductor (Post-process) item handled by ASKINDEX Korea. External dimensions: 1520x2570x2600. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Dainippon Screen) and the same category (Semiconductor (Post-process)).
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