Evaporation device - Anelva 特型L-400EK-L
Product Specifications
Maker Anelva
Model 特型L-400EK-L
Category Semiconductor (Pre-process)
Model year 2002
External Dimensions W1600 D1500 H2310
Condition Used
Showroom Information
Exhibition hall Tsuru Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number KC0476
Mechanical Specifications
Water volume 0.3MPa 9L/min Air pressure 0.55MPa
External dimensions: W1600 x D1500 x H2310, Weight: 1.0 t
Power supply 3 phase 200V 50/60Hz 60A
In addition to the parts, there is one accessory.
Substrate: 50mm square substrate, TS distance 250mm, substrate heating 500℃
LL chamber exhaust_Turbo pump TG220F/TC221, Vacuum chamber_Cryopump P-121-GJ, Auxiliary dry pump_V060HA, 3 XTC film thickness gauges, Evaporation power supply 3Kw, 2Kw, 1.5Kw
Attachments
Product Overview
Anelva 特型L-400EK-L is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. External dimensions: W1600 D1500 H2310. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Anelva) and the same category (Semiconductor (Pre-process)).
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