Metal Dry Etching - Panasonic E620I
Product Specifications
Maker Panasonic
Model E620I
Category Semiconductor (Pre-process)
Model year 2013
External Dimensions 1000x2500x2000
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number L40383
Mechanical Specifications
Three-phase 200V 75A Single-phase 100V 75A
Weight 1550KG 4-inch specification
EBARA dry pump included SR20 s/nDFB03284
[Gas used]
BCL3 200sccm CL2 200sccm
CF4 100sccm N2 100sccm
Ar 200sccm CHF3 100sccm
Attachments
Product Overview
Panasonic E620I is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. External dimensions: 1000x2500x2000. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Panasonic) and the same category (Semiconductor (Pre-process)).
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