Metal Dry Etching - Panasonic E620I
Product Specifications
Maker Panasonic
Model E620I
Category Semiconductor (Pre-process)
Model year 2013
External Dimensions 1000x2500x2000
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number L40383
Product Overview
Panasonic E620I is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. External dimensions: 1000x2500x2000. It is kept in stock at our Kyushu Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (Panasonic) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
Three-phase 200V 75A Single-phase 100V 75A
Weight 1550KG 4-inch specification
EBARA dry pump included SR20 s/nDFB03284
[Gas used]
BCL3 200sccm CL2 200sccm
CF4 100sccm N2 100sccm
Ar 200sccm CHF3 100sccm
Attachments
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