Sputtering Equipment - Shimadzu Corporation HSR-521A
Product Specifications
Maker Shimadzu Corporation
Model HSR-521A
Category Semiconductor (Pre-process)
Model year 1991
External Dimensions 1200x900x1700
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number L40596
Mechanical Specifications
Sputter-up method High frequency magnetron discharge
Target distance 40-40mm 3 holders
Number of boards mounted: 4 Maximum heating temperature: 300℃
Chamber dimensions: φ450x220H
Board holder dimensions φ350
High frequency output 1KW 13.56MHz 2 outputs
Three phase 200V 30A
Attachments
Product Overview
Shimadzu Corporation HSR-521A is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. External dimensions: 1200x900x1700. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Shimadzu Corporation) and the same category (Semiconductor (Pre-process)).
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