Sputtering Equipment - Shimadzu Corporation HSR-521A
Product Specifications
Maker Shimadzu Corporation
Model HSR-521A
Category Semiconductor (Pre-process)
Model year 1991
External Dimensions 1200x900x1700
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number L40596
Product Overview
Shimadzu Corporation HSR-521A is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. External dimensions: 1200x900x1700. It is kept in stock at our Kyushu Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (Shimadzu Corporation) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
Sputter-up method High frequency magnetron discharge
Target distance 40-40mm 3 holders
Number of boards mounted: 4 Maximum heating temperature: 300℃
Chamber dimensions: φ450x220H
Board holder dimensions φ350
High frequency output 1KW 13.56MHz 2 outputs
Three phase 200V 30A
Attachments
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