Sputtering Equipment - Canon Anelva E-401S
Product Specifications
Maker Canon Anelva
Model E-401S
Category Semiconductor (Pre-process)
Model year 2008年10月
External Dimensions 1500x2200x2050
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number L70635
Product Overview
Canon Anelva E-401S is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. External dimensions: 1500x2200x2050. It is kept in stock at our Kyushu Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (Canon Anelva) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
4-inch x 5-sheet tray specification Cassette 5-tier
Spatter down method
Automatic coating, maximum diameter 220mm
Static opposing deposition Max. φ100mm
Equipped with 4 φ4 magnet cathodes
RF 2-target simultaneous sputtering possible
Distance between substrate and electrode can be changed (motor driven)
Maximum substrate heating temperature: 300°
3φ200V±10% 100A 50/60Hz
Attachments
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