Sputtering equipment - Shibaura Mechatronics CFS-8EP-55
Product Specifications
Maker Shibaura Mechatronics
Model CFS-8EP-55
Category Semiconductor (Pre-process)
Model year 2001
External Dimensions 1300x1100x1500
Condition Used
Showroom Information
Exhibition hall Enzan Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number L70733
Mechanical Specifications
Down sputtering method: 3 types available
2-inch ceramic substrate (φ300 effective area)
Film thickness distribution within R150mm from the center
Magnetron sputter down
DC co-sputtering and layered film deposition possible
Lamp heating method: Maximum 350℃, normal temperature: 300℃
Vacuum chamber inner dimensions φ550x380H SUS304
Film forming material Pt Au Ti
3φ200V 50Hz 25KVA
Specifications available
Attachments
Product Overview
Shibaura Mechatronics CFS-8EP-55 is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. External dimensions: 1300x1100x1500. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Shibaura Mechatronics) and the same category (Semiconductor (Pre-process)).
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