Dry etching equipment (high density) - Panasonic E628I
Product Specifications
Maker Panasonic
Model E628I
Category Semiconductor (Pre-process)
Model year 2007
External Dimensions 1000x2400x1900
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number L70770
Mechanical Specifications
Single wafer processing, 2 cassettes, 6-inch specifications
Chamber outer dimensions: 360x360x148(mm)
Plasma type multi-spiral coil ICP
RF power supply 13.56MHz 1250W
Upper electrode: Quartz top plate (φ348)
Upper electrode heating 50-100℃
Distance between electrodes 122mm 3φ200V 75A
[Gas used] C4F8 100sccm
CF4 200sccm SF6 100sccm
Ar 400sccm O2 200sccm
N2 20sccm He 50sccm
Attachments
Product Overview
Panasonic E628I is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. External dimensions: 1000x2400x1900. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Panasonic) and the same category (Semiconductor (Pre-process)).
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