CVD equipment - Samco PD-270STL
Product Specifications
Maker Samco
Model PD-270STL
Category Semiconductor (Pre-process)
Model year 2006
External Dimensions 1210x2730x2100
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number L70771
Mechanical Specifications
Applicable substrates: Maximum φ4 x 3 substrates
Reactor inner diameter: φ425mm H200mm
Electrode structure: unshielded parallel plate electrode
Heating mechanism: Constant temperature circulator system
Operating temperature: 25-200℃
High frequency power supply: 13.56MHz Max.1KW
Liquid source tank temperature control range: 60-85℃
Pipe heating temperature control range: 35 to 80°C
TEOS tank capacity: 2L
3-phase AC200V 125A 50Hz
Gas used: C2F6 O2 TEOS
Attachments
Product Overview
Samco PD-270STL is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. External dimensions: 1210x2730x2100. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Samco) and the same category (Semiconductor (Pre-process)).
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