CVD equipment - Samco PD-270STL
Product Specifications
Maker Samco
Model PD-270STL
Category Semiconductor (Pre-process)
Model year 2006
External Dimensions 1210x2730x2100
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number L70771
Product Overview
Samco PD-270STL is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. External dimensions: 1210x2730x2100. It is kept in stock at our Kyushu Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (Samco) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
Applicable substrates: Maximum φ4 x 3 substrates
Reactor inner diameter: φ425mm H200mm
Electrode structure: unshielded parallel plate electrode
Heating mechanism: Constant temperature circulator system
Operating temperature: 25-200℃
High frequency power supply: 13.56MHz Max.1KW
Liquid source tank temperature control range: 60-85℃
Pipe heating temperature control range: 35 to 80°C
TEOS tank capacity: 2L
3-phase AC200V 125A 50Hz
Gas used: C2F6 O2 TEOS
Attachments
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