CVD equipment - Samco PD-200STN
Product Specifications
Maker Samco
Model PD-200STN
Category Semiconductor (Pre-process)
Model year 2003年
External Dimensions 1370x1800x2000
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number L70773
Mechanical Specifications
Applicable substrate: Maximum φ6 x 1 processing
Electrode structure: unshielded parallel plate electrode
Heating mechanism: resistance heating method
Upper part Max.400℃ Normal use 300℃ or less
Lower part Max.400℃ Normal use 350℃ or less
High frequency power supply: 13.56MHz Max.500W
Liquid source tank temperature control range: 60-85℃
Pipe heating temperature control range: 35 to 80°C
TEOS tank capacity 2L 3φ AC200V
Gas used: CF4O2 N2
Attachments
Product Overview
Samco PD-200STN is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. External dimensions: 1370x1800x2000. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Samco) and the same category (Semiconductor (Pre-process)).
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