CVD equipment - Samco PD-200STN
Product Specifications
Maker Samco
Model PD-200STN
Category Semiconductor (Pre-process)
Model year 2003年
External Dimensions 1370x1800x2000
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number L70773
Product Overview
Samco PD-200STN is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. External dimensions: 1370x1800x2000. It is kept in stock at our Kyushu Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (Samco) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
Applicable substrate: Maximum φ6 x 1 processing
Electrode structure: unshielded parallel plate electrode
Heating mechanism: resistance heating method
Upper part Max.400℃ Normal use 300℃ or less
Lower part Max.400℃ Normal use 350℃ or less
High frequency power supply: 13.56MHz Max.500W
Liquid source tank temperature control range: 60-85℃
Pipe heating temperature control range: 35 to 80°C
TEOS tank capacity 2L 3φ AC200V
Gas used: CF4O2 N2
Attachments
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