Dry Etching Equipment - ULVAC RH-3030P
Product Specifications
Maker ULVAC
Model RH-3030P
Category Semiconductor (Pre-process)
Model year 1992
External Dimensions 1700x1550x2000
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number L70775
Product Overview
ULVAC RH-3030P is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. External dimensions: 1700x1550x2000. It is kept in stock at our Kyushu Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (ULVAC) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
Material: Ceramic
Board electrode size
Etching electrode 500Lx500W(mm)
Counter electrode 500Lx500W
Etching conditions: Parallel plate type (face up)
Board to board distance: 30 to 80 mm
Power supply: 3KW (1356MHz)
Heating mechanism RF electrode 5 to 45°C
3φ 200V 50Hz
Attachments
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