Dry Etching Equipment - ULVAC RH-3030P
Product Specifications
Maker ULVAC
Model RH-3030P
Category Semiconductor (Pre-process)
Model year 1992
External Dimensions 1700x1550x2000
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number L70775
Mechanical Specifications
Material: Ceramic
Board electrode size
Etching electrode 500Lx500W(mm)
Counter electrode 500Lx500W
Etching conditions: Parallel plate type (face up)
Board to board distance: 30 to 80 mm
Power supply: 3KW (1356MHz)
Heating mechanism RF electrode 5 to 45°C
3φ 200V 50Hz
Attachments
Product Overview
ULVAC RH-3030P is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. External dimensions: 1700x1550x2000. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (ULVAC) and the same category (Semiconductor (Pre-process)).
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