Plasma processing equipment - S-Craft WLP600S
Product Specifications
Maker S-Craft
Model WLP600S
Category Semiconductor (Pre-process)
Model year 2010.8
External Dimensions W600 D1600 H1850
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number L70822
Product Overview
S-Craft WLP600S is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. External dimensions: W600 D1600 H1850. It is kept in stock at our Kyushu Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (S-Craft) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
1/4" body, compatible wafers: 6-inch and 8-inch, RF power supply (AX-600III) maximum output 600W, silicon rubber heater: 1500W, power supply: 3-phase 200V 50Hz 60A, air fitting diameter 1/4, swage, process gas diameter 1/4VCR, N2 gas 3/8VCR, exhaust duct Φ100, 2/4" dry pump (SDE303A) exhaust capacity 5000L/min, intake port NW50, cooling water Rc3/8, thermal exhaust Φ50, 3/4" chiller (CH-402B) control range: room temperature to +80℃, circulation pump 25L/min, 4/4PC
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