Plasma processing equipment - S-Craft WLP600S
Product Specifications
Maker S-Craft
Model WLP600S
Category Semiconductor (Pre-process)
Model year 2010.8
External Dimensions W600 D1600 H1850
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number L70822
Mechanical Specifications
1/4" body, compatible wafers: 6-inch and 8-inch, RF power supply (AX-600III) maximum output 600W, silicon rubber heater: 1500W, power supply: 3-phase 200V 50Hz 60A, air fitting diameter 1/4, swage, process gas diameter 1/4VCR, N2 gas 3/8VCR, exhaust duct Φ100, 2/4" dry pump (SDE303A) exhaust capacity 5000L/min, intake port NW50, cooling water Rc3/8, thermal exhaust Φ50, 3/4" chiller (CH-402B) control range: room temperature to +80℃, circulation pump 25L/min, 4/4PC
Attachments
Product Overview
S-Craft WLP600S is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. External dimensions: W600 D1600 H1850. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (S-Craft) and the same category (Semiconductor (Pre-process)).
※ Click on the image below to zoom in.
