Sputtering equipment - Anelva L-501S-FHL
Product Specifications
Maker Anelva
Model L-501S-FHL
Category Semiconductor (Pre-process)
Model year 2004年2月
External Dimensions 3900x1800x2600
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number L70849
Mechanical Specifications
Sputter-up method φ6 inch
SP1 room φ500mm
Cathode φ317mm PMC
Holder shape φ290mm heated/cold water holder
Storage board: 1 φ150 board tray
Stroke: Approx. 100mm
Distance between electrodes: approx. 50mm to 150mm
SP2 room φ500mm
Cathode TGT1 and TGT2 φ100mm PMC
Cathode mounting position PCD260mm
Target dimensions: Non-magnetic material φ101.6 x 5t (2 units)
TGT3 φ100mmRMC
Cathode mounting position PCD200mm
Target dimensions: Ni magnetic material φ110 x 4t (1 unit)
Holder shape φ290mm heated/cold water holder
Storage board: 1 φ150 board tray
Stroke: Approx. 300 mm
Distance between electrodes: approx. 100mm to 400mm
RF power supply 5KW (SP1 room)
Attachments
Product Overview
Anelva L-501S-FHL is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. External dimensions: 3900x1800x2600. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Anelva) and the same category (Semiconductor (Pre-process)).
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