Sputtering equipment - Anelva L-501S-FHL
Product Specifications
Maker Anelva
Model L-501S-FHL
Category Semiconductor (Pre-process)
Model year 2004年2月
External Dimensions 3900x1800x2600
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number L70849
Product Overview
Anelva L-501S-FHL is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. External dimensions: 3900x1800x2600. It is kept in stock at our Kyushu Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (Anelva) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
Sputter-up method φ6 inch
SP1 room φ500mm
Cathode φ317mm PMC
Holder shape φ290mm heated/cold water holder
Storage board: 1 φ150 board tray
Stroke: Approx. 100mm
Distance between electrodes: approx. 50mm to 150mm
SP2 room φ500mm
Cathode TGT1 and TGT2 φ100mm PMC
Cathode mounting position PCD260mm
Target dimensions: Non-magnetic material φ101.6 x 5t (2 units)
TGT3 φ100mmRMC
Cathode mounting position PCD200mm
Target dimensions: Ni magnetic material φ110 x 4t (1 unit)
Holder shape φ290mm heated/cold water holder
Storage board: 1 φ150 board tray
Stroke: Approx. 300 mm
Distance between electrodes: approx. 100mm to 400mm
RF power supply 5KW (SP1 room)
Attachments
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