Evaporation apparatus (EB) - ULVAC EBX-10C
Product Specifications
Maker ULVAC
Model EBX-10C
Category Semiconductor (Pre-process)
Model year 2007
Condition Used
Showroom Information
Exhibition hall Enzan Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number LC0084
Product Overview
ULVAC EBX-10C is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. It is kept in stock at our Enzan Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (ULVAC) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
Vacuum size: φ650 H800 (SUS304)
E/B power supply: 10kW
Input power: 3φ AC200V 60Hz
Base heating lamp heater 150℃ (max 200℃)
Cryopump (ULVAC: U-10PU)
Attachments
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