Vacuum deposition equipment - Optolan OTFC-1300DBI
Product Specifications
Maker Optolan
Model OTFC-1300DBI
Category Semiconductor (Pre-process)
Model year 2006
External Dimensions W4325 D4610 H2910mm
Condition Used
Showroom Information
Exhibition hall Tsuru Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number M10330
Product Overview
Optolan OTFC-1300DBI is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. External dimensions: W4325 D4610 H2910mm. It is kept in stock at our Tsuru Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (Optolan) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
Vacuum chamber: SUS304 Φ1300×H1610mm
Substrate dome: Φ1150mm
Optical film thickness control: HOM2-R-VIS350A optical monitor
Reflective type/Transparent type
・Quartz film thickness gauge: XTC/2+6-point rotary sensor
・Vapor deposition source: 1 electron gun, 1 resistance heater
Ion source: 17cm RF ion source
Exhaust system: Coarse grinding pump + 2 diffusion pumps and Polycold
Substrate heating temperature: Max350℃
Attachments
※ Click on the image below to zoom in.
