Vacuum deposition equipment - Optolan OTFC-1300DBI
Product Specifications
Maker Optolan
Model OTFC-1300DBI
Category Semiconductor (Pre-process)
Model year 2006
External Dimensions W4325 D4610 H2910mm
Condition Used
Showroom Information
Exhibition hall Tsuru Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number M10330
Mechanical Specifications
Vacuum chamber: SUS304 Φ1300×H1610mm
Substrate dome: Φ1150mm
Optical film thickness control: HOM2-R-VIS350A optical monitor
Reflective type/Transparent type
・Quartz film thickness gauge: XTC/2+6-point rotary sensor
・Vapor deposition source: 1 electron gun, 1 resistance heater
Ion source: 17cm RF ion source
Exhaust system: Coarse grinding pump + 2 diffusion pumps and Polycold
Substrate heating temperature: Max350℃
Attachments
Product Overview
Optolan OTFC-1300DBI is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. External dimensions: W4325 D4610 H2910mm. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Optolan) and the same category (Semiconductor (Pre-process)).
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