Annealing furnace - ULVAC RTA-6000
Product Specifications
Maker ULVAC
Model RTA-6000
Category Semiconductor (Pre-process)
Model year 2009
External Dimensions 1820x2400x1850
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number M20462
Mechanical Specifications
4-inch (6-inch) SiC specifications
Regular use RT~1000℃ Max1050℃
Temperature Recipe
10℃/s→850℃ 180sec→300℃ Approx. 200sec
10℃/s→1000℃ 200sec→300℃ Approx. 200sec
Maximum heating rate 10℃/sec RT~1000℃
Parabolic reflective infrared radiation heating method
3φ200V 25.4KVA
Attachments
Product Overview
ULVAC RTA-6000 is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. External dimensions: 1820x2400x1850. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (ULVAC) and the same category (Semiconductor (Pre-process)).
※ Click on the image below to zoom in.