Semiconductor (Post-process)

Prover - Tokyo Precision (TSK) UF200

Product Specifications

Maker Tokyo Precision (TSK)

Model UF200

Model year 2000.2

External Dimensions W1150 D1130 H1740

Showroom Information

Exhibition hall Kyushu Technical Center

Price & Inquiry

price Price Inquiry

Inquiry Number M40976

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manufacturer Tokyo precision (TSK)

model UF200

year 2000.2

->

Machine specification Compatible wafer: 5, 6, 8 inches
XY axis: Proving area ± 120mm
Maximum speed 200mm/s
Z Axis: Full Stroke 69mm
Air supply: 0.4MPa or more
Vacuum: -53kpa or higher
Power: 200V 50/60Hz 1.5kva

Attachment

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Tokyo Precision (TSK) UF200 Prover - ASKINDEX Korea

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