Sputtering equipment - Choshu Industry DSSC-IS1P3
Product Specifications
Maker Choshu Industry
Model DSSC-IS1P3
Category Semiconductor (Pre-process)
Model year 2013
External Dimensions W4000 D4000 H2530
Condition Used
Showroom Information
Exhibition hall Enzan Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number MB0049
Mechanical Specifications
Equipment configuration: LL room 1 → SP room → LL room 2
Flow direction: Left-hand
Load lock chamber: Can store up to 16 workpieces. EV mechanism
Board size: 500mm x 500mm
Target size: 5in x 26in, Depot up
Sputtering power supply: RF power supply 5kW NR5N-08
Etching power supply: RF power supply 3kW NR3N-04A
Exhaust system: LL1 (TMP + Dry), SP chamber (TMP + Dry), LL2 (TMP + Dry)
Input power: 3φAC200V
Attachments
Product Overview
Choshu Industry DSSC-IS1P3 is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. External dimensions: W4000 D4000 H2530. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Choshu Industry) and the same category (Semiconductor (Pre-process)).
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