Etching equipment - Samco RIE-400iPB
Product Specifications
Maker Samco
Model RIE-400iPB
Category Semiconductor (Pre-process)
Model year 2009
External Dimensions W986 D1792 H1975
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number N11279
Product Overview
Samco RIE-400iPB is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. External dimensions: W986 D1792 H1975. It is kept in stock at our Kyushu Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (Samco) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
Reaction chamber: Inner diameter φ320, with φ37mm viewport (one on the right) and rubber heater
LL room external dimensions W 340mm D445 H144mm
ICP unit, 2-turn coil, lower electrode, φ106mm (maximum φ4 inch compatible)
ICP 13.56MHz Max 1KW BIAS 13.56MHz Max 300W
3φ200V 60Hz 60A Gas used: CHF3 O2 Ar C4F8 SF6
Attachments
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