Etching equipment - Samco RIE-400iPB
Product Specifications
Maker Samco
Model RIE-400iPB
Category Semiconductor (Pre-process)
Model year 2009
External Dimensions W986 D1792 H1975
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number N11279
Mechanical Specifications
Reaction chamber: Inner diameter φ320, with φ37mm viewport (one on the right) and rubber heater
LL room external dimensions W 340mm D445 H144mm
ICP unit, 2-turn coil, lower electrode, φ106mm (maximum φ4 inch compatible)
ICP 13.56MHz Max 1KW BIAS 13.56MHz Max 300W
3φ200V 60Hz 60A Gas used: CHF3 O2 Ar C4F8 SF6
Attachments
Product Overview
Samco RIE-400iPB is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. External dimensions: W986 D1792 H1975. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Samco) and the same category (Semiconductor (Pre-process)).
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