Sputtering Equipment - Shibaura Mechatronics CFS-4EP-LL
Product Specifications
Maker Shibaura Mechatronics
Model CFS-4EP-LL
Category Semiconductor (Pre-process)
Model year 2001
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number N30392
Mechanical Specifications
Processing volume: within φ200mm (effective φ170mm)
Number of targets: 3 x 4in cathodes
T1 (DC power supply only), T2 (DC power supply only), T3 (RF power supply only)
Reverse sputtering mechanism available
Jig heating: MAX 300℃
Input power supply: 3φAC200V 8kVA
Attachments
Product Overview
Shibaura Mechatronics CFS-4EP-LL is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Shibaura Mechatronics) and the same category (Semiconductor (Pre-process)).
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