Stylus-type step thickness gauge - KLA-Tencor Alpha-Step IQ
Product Specifications
Maker KLA-Tencor
Model Alpha-Step IQ
Category Measuring Instruments ・ Instruments
Model year 2007
External Dimensions W430 D660 H290
Condition Used
Showroom Information
Exhibition hall Enzan Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number N31367
Product Overview
KLA-Tencor Alpha-Step IQ is a used Measuring Instruments ・ Instruments item available from ASKINDEX Korea. External dimensions: W430 D660 H290. It is kept in stock at our Enzan Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (KLA-Tencor) and the same category (Measuring Instruments ・ Instruments).
Mechanical Specifications
Stylus type (stage drive, fixed stylus)
Vertical resolution/measurement range 1Å/±6.5μm, 5Å/32μm, 25Å/±300μm
Step measurement repeatability: 8Å (13μm range)
Scanning distance: Max. 60mm
Scanning speed: 1 μm/sec - 25 mm/sec
Sampling rate: 50, 100, 200, 500, 1000 points/second
Sample size: Maximum 254mm
Access range: Maximum 152mm
Camera: Side view: 95-410x, Top view: 115-465x
Power supply: Single phase AC100-240V 50/60Hz 1.35A
External dimensions: W430 D660 H290
*PC set included (booting confirmed OK)
DELL OPTIPLEX GX520
OS Windows XP Pro 2002 SP2
CPU Pentium4 2.8GHz
Memory 1GB
80GB HDD
Attachments
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