Stylus-type step thickness gauge - KLA-Tencor Alpha-Step IQ
Product Specifications
Maker KLA-Tencor
Model Alpha-Step IQ
Model year 2007
External Dimensions W430 D660 H290
Showroom Information
Exhibition hall Enzan Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number N31367
Mechanical Specifications
Stylus type (stage drive, fixed stylus)
Vertical resolution/measurement range 1Å/±6.5μm, 5Å/32μm, 25Å/±300μm
Step measurement repeatability: 8Å (13μm range)
Scanning distance: Max. 60mm
Scanning speed: 1 μm/sec - 25 mm/sec
Sampling rate: 50, 100, 200, 500, 1000 points/second
Sample size: Maximum 254mm
Access range: Maximum 152mm
Camera: Side view: 95-410x, Top view: 115-465x
Power supply: Single phase AC100-240V 50/60Hz 1.35A
External dimensions: W430 D660 H290
*PC set included (booting confirmed OK)
DELL OPTIPLEX GX520
OS Windows XP Pro 2002 SP2
CPU Pentium4 2.8GHz
Memory 1GB
80GB HDD
Attachments
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