Winding sputtering equipment - Lock Technology RVS-W-510-A
Product Specifications
Maker Lock Technology
Model RVS-W-510-A
Category Semiconductor (Pre-process)
Model year 2011
External Dimensions W4750 D5900 H2700
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number N80462
Product Overview
Lock Technology RVS-W-510-A is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. External dimensions: W4750 D5900 H2700. It is kept in stock at our Kyushu Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (Lock Technology) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
Winding section: width 510mm, thickness: 50μm to 175μm
3 magnetron cathodes (128mm x 725mm square)
Sputtering power supply: 20Kw x 2, 10Kw x 1
Film formation speed: 200nm・m/min
Heating temperature: 200℃ Magnet: 400G
High frequency power supply: 0.75Kw
Target divider box: 550mm x 180mm
Pretreatment chamber: 550mm x 72mm Target substrate: 100mm
Vacuum chamber inner dimensions: W1050xD1250xH1700
Usable cores/taper caps: 3 inch, 6 inch
3φ200V 50Hz 130Kw
Gas used: Ar N2
Attachments
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