Etching Equipment - ULVAC NE-701
Product Specifications
Maker ULVAC
Model NE-701
Category Semiconductor (Pre-process)
Model year 2007
External Dimensions W1300 D2400 H2000
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number NC1074
Mechanical Specifications
3 phase: 200V 19.9kVA 50/60Hz
Board size: Φ6 inches
Process gas: O2, Ar, Cl2, BCl3, 100sccm each
P-N2, cooling: He
Power supply: ANTRNNA: RF1000W, BIAS: RF300W
Batch/Single-wafer: Batch type
Board holding method: ESC chuck
【accessories】
・Dry pump HR60
・Rotary pump D-650DK
・Chiller CA-1112
Attachments
Product Overview
ULVAC NE-701 is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. External dimensions: W1300 D2400 H2000. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (ULVAC) and the same category (Semiconductor (Pre-process)).
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