Etching Equipment - ULVAC NE-701
Product Specifications
Maker ULVAC
Model NE-701
Category Semiconductor (Pre-process)
Model year 2007
External Dimensions W1300 D2400 H2000
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number NC1074
Product Overview
ULVAC NE-701 is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. External dimensions: W1300 D2400 H2000. It is kept in stock at our Kyushu Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (ULVAC) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
3 phase: 200V 19.9kVA 50/60Hz
Board size: Φ6 inches
Process gas: O2, Ar, Cl2, BCl3, 100sccm each
P-N2, cooling: He
Power supply: ANTRNNA: RF1000W, BIAS: RF300W
Batch/Single-wafer: Batch type
Board holding method: ESC chuck
【accessories】
・Dry pump HR60
・Rotary pump D-650DK
・Chiller CA-1112
Attachments
※ Click on the image below to zoom in.
