Ashing device - Tokyo Ohka Kogyo TCA-3811
Product Specifications
Maker Tokyo Ohka Kogyo
Model TCA-3811
Category Semiconductor (Pre-process)
Model year 2008
External Dimensions W900 D1850 H2050
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number NC1077
Mechanical Specifications
3 phase: 200V 50A/60Hz
Board size: 75mm
RF power: 1000W 13.56MHz
<Exhaust set>
・Rotary pump ALCATEL2063
・Mechanical booster pump ANELVA B301
・Diaphragm ULVAC DA-20D
Attachments
Product Overview
Tokyo Ohka Kogyo TCA-3811 is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. External dimensions: W900 D1850 H2050. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Tokyo Ohka Kogyo) and the same category (Semiconductor (Pre-process)).
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