Ashing device - Tokyo Ohka Kogyo TCA-3811
Product Specifications
Maker Tokyo Ohka Kogyo
Model TCA-3811
Category Semiconductor (Pre-process)
Model year 2008
External Dimensions W900 D1850 H2050
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number NC1077
Product Overview
Tokyo Ohka Kogyo TCA-3811 is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. External dimensions: W900 D1850 H2050. It is kept in stock at our Kyushu Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (Tokyo Ohka Kogyo) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
3 phase: 200V 50A/60Hz
Board size: 75mm
RF power: 1000W 13.56MHz
<Exhaust set>
・Rotary pump ALCATEL2063
・Mechanical booster pump ANELVA B301
・Diaphragm ULVAC DA-20D
Attachments
※ Click on the image below to zoom in.
