Sputtering Equipment - Anelva SPC-540H
Product Specifications
Maker Anelva
Model SPC-540H
Category Semiconductor (Pre-process)
Model year 1984
External Dimensions 1500×1050×2210
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number NC1156
Mechanical Specifications
Target size: Approx. 110mm x 280mm
Sputtering power supply: RF power supply (200V 3Φ 40A 5kW) 4/9 - (W570D750H1590) 5/9, 6/9, 7/9 - (W570D730H1305)
Control panel: 2/9-(W575D910H2300) 3/9-W570D770H1815
Cryopump: ALCATEL-2063-SD (W255D815H415)
Cryocompressor: SUMITOMO-CKW21 (W480D550H465)
Attachments
Product Overview
Anelva SPC-540H is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. External dimensions: 1500×1050×2210. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Anelva) and the same category (Semiconductor (Pre-process)).
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