Sputtering Equipment - Anelva SPC-540H
Product Specifications
Maker Anelva
Model SPC-540H
Category Semiconductor (Pre-process)
Model year 1984
External Dimensions 1500×1050×2210
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number NC1156
Product Overview
Anelva SPC-540H is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. External dimensions: 1500×1050×2210. It is kept in stock at our Kyushu Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (Anelva) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
Target size: Approx. 110mm x 280mm
Sputtering power supply: RF power supply (200V 3Φ 40A 5kW) 4/9 - (W570D750H1590) 5/9, 6/9, 7/9 - (W570D730H1305)
Control panel: 2/9-(W575D910H2300) 3/9-W570D770H1815
Cryopump: ALCATEL-2063-SD (W255D815H415)
Cryocompressor: SUMITOMO-CKW21 (W480D550H465)
Attachments
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