Sputtering Equipment - Anelva SPF-530H
Product Specifications
Maker Anelva
Model SPF-530H
Category Semiconductor (Pre-process)
Model year 1988
External Dimensions (本体)W1500 D1100 H1750
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number NC1182
Mechanical Specifications
Power supply: 200V 60A 50/60Hz
Cooling water: 2kgf/cm2 10l
Air pressure: 7kgf/cm2
RF power supply: PRF-503 (Anelva)
MP: CAP-80 Mark II (Anelva)
Target size: φ6 inches (150 mm)
Number of targets: 3, 3 backing plates included (attached to the main unit)
Gas used: Ar
Film formation method: Sputter UP
Attachments
Product Overview
Anelva SPF-530H is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. External dimensions: (本体)W1500 D1100 H1750. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Anelva) and the same category (Semiconductor (Pre-process)).
※ Click on the image below to zoom in.
