Sputtering Equipment - Anelva SPF-530H
Product Specifications
Maker Anelva
Model SPF-530H
Category Semiconductor (Pre-process)
Model year 1991
External Dimensions (本体)W1500 D1100 H1750
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number NC1183
Product Overview
Anelva SPF-530H is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. External dimensions: (本体)W1500 D1100 H1750. It is kept in stock at our Kyushu Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (Anelva) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
Power supply: 200V 60A 50/60Hz
Cooling water: 2kgf/cm2 10l
Air pressure: 7kgf/cm2
RF power supply: PRF-246C (Anelva)
MP: CAP-121 (Anelva)
Target size: φ6 inches (150 mm)
Number of targets: 3
Gas used: Ar, O2
Film formation method: Sputter UP
Attachments
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