Sputtering Equipment - Anelva SPC-540H
Product Specifications
Maker Anelva
Model SPC-540H
Category Semiconductor (Pre-process)
Model year 1984
External Dimensions (本体)W1650 D1350 H2180
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number NC1184
Product Overview
Anelva SPC-540H is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. External dimensions: (本体)W1650 D1350 H2180. It is kept in stock at our Kyushu Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (Anelva) and the same category (Semiconductor (Pre-process)).
Machine specifications Power supply: 200V 75A 60Hz
Cooling water: 3kgf/cm2 22L
Air pressure: 5kgf/cm2
RF power supply: PRF-503 2 units → 1 unit with switch (Anelva)
DC power supply: PDC087B (Anelva)
MP: CAP-121 (Anelva)
Target size: Approximately 130mm x 380mm
Number of targets: 4
Gas used: Ar, O2
Film formation method: Sputter SIDE
Attachments
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