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Plasma cleaner - Yamato Science PDC210

Product Specifications

Maker Yamato Science

Model PDC210

Category Semiconductor (Post-process)

External Dimensions W800 D660 H1350

Condition Used

Showroom Information

Exhibition hall Kyushu Technical Center

Price & Inquiry

price Price Inquiry

Inquiry Number O51100

Mechanical Specifications

Plasma mode RIE (DP mode option)

Electrode structure Parallel plate (fixed between electrodes)

High frequency output: MAX.500W

Oscillation frequency: 13.56MHz crystal oscillation

Stage dimensions: W250×D170mm

Chamber material: Aluminum

Reactive gas: Argon

Input: AC200V3φ 50/60Hz

Internal dimensions: W400 D250 H150

Vacuum pump: PASCAL2021SD

Attachments

Product Overview

Yamato Science PDC210 is a used Semiconductor (Post-process) item handled by ASKINDEX Korea. External dimensions: W800 D660 H1350. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Yamato Science) and the same category (Semiconductor (Post-process)).

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Yamato Science PDC210 Plasma cleaner - ASKINDEX Korea

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