Sputtering Equipment - Anelva SPF-530H
Product Specifications
Maker Anelva
Model SPF-530H
Category Semiconductor (Pre-process)
Model year 1988年
External Dimensions （本体）W1500 D1100 H1750
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number O51138
Mechanical Specifications
Power supply: 200V 60A 50/60Hz
Cooling water: 2kgf/cm2 10L
Air pressure: 7kgf/cm2
RF power supply: PRF-153B (Anelva)
DC power supply: PDC057B (Anelva)
MP: CAP-121 (Anelva)
Target size: φ6 inches (150 mm)
Number of targets: 3, 3 backing plates included (attached to the main unit)
Gas used: Ar, O2
Film formation method: Sputter UP
Attachments
Product Overview
Anelva SPF-530H is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. External dimensions: （本体）W1500 D1100 H1750. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Anelva) and the same category (Semiconductor (Pre-process)).
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