Dry Etching Equipment - Showa Vacuum SPE-2010
Product Specifications
Maker Showa Vacuum
Model SPE-2010
Category Semiconductor (Pre-process)
Model year 2015
External Dimensions （本体）W1000 D1100 H1600
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number O51173
Product Overview
Showa Vacuum SPE-2010 is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. External dimensions: （本体）W1000 D1100 H1600. It is kept in stock at our Kyushu Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (Showa Vacuum) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
Power supply: φ3 200V 16.7KVA 60Hz
Cooling water: 0.2Mpa 0.96m3/h
Air pressure: 0.5Mpa
RF power: 13.56MHz (Max500W)
MP: VG203VA / Osaka Vacuum (2.7x10-3Pa or less)
Board size: φ3 inch (orientation flat)
Gases used: He, O2, CHF3
Etching method: Reactive etching
Attachments
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