Load-lock type sputtering equipment - ULVAC ISP-4000-HC
Product Specifications
Maker ULVAC
Model ISP-4000-HC
Category Semiconductor (Pre-process)
Condition Used
Showroom Information
Exhibition hall Enzan Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number O60273
Product Overview
ULVAC ISP-4000-HC is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. It is kept in stock at our Enzan Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (ULVAC) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
Three-way simultaneous deposition possible (up-sputtering)
Target size 50.8mm
Sputtering power supply (RF power supply, DC power supply)
Usable board size: Maximum φ100mm
Substrate heating: Maximum 800℃
Oil rotary vacuum pump x 2 units
Power supply: Three-phase AC200V
Attachments
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