Load-lock type sputtering equipment - ULVAC ISP-4000-HC
Product Specifications
Maker ULVAC
Model ISP-4000-HC
Category Semiconductor (Pre-process)
Condition Used
Showroom Information
Exhibition hall Enzan Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number O60273
Mechanical Specifications
Three-way simultaneous deposition possible (up-sputtering)
Target size 50.8mm
Sputtering power supply (RF power supply, DC power supply)
Usable board size: Maximum φ100mm
Substrate heating: Maximum 800℃
Oil rotary vacuum pump x 2 units
Power supply: Three-phase AC200V
Attachments
Product Overview
ULVAC ISP-4000-HC is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (ULVAC) and the same category (Semiconductor (Pre-process)).
※ Click on the image below to zoom in.