Sputtering Equipment - ULVAC SH-450
Product Specifications
Maker ULVAC
Model SH-450
Category Semiconductor (Pre-process)
Model year 1995
External Dimensions W1900D1400H1800
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number O60881
Mechanical Specifications
Power supply: 3-phase 200V, 33.2 kvA
Sputtering method: Up target
Dimensions: Φ152.4mm x t6
Number of boards to be mounted: □4”, Φ4”, Φ3”
Sub-holder for circuit board: 5 pieces/batch
Substrate electrode Φ450mm
Water-cooled turntable
RF power supply 13.56MHz
Output 2.0 kW
DC power supply 4kW
MFC (Ar, N2, O2, H2)
Attachments
Product Overview
ULVAC SH-450 is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. External dimensions: W1900D1400H1800. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (ULVAC) and the same category (Semiconductor (Pre-process)).
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