Sputtering Equipment - ULVAC SH-450
Product Specifications
Maker ULVAC
Model SH-450
Category Semiconductor (Pre-process)
Model year 1995
External Dimensions W1900D1400H1800
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number O60881
Product Overview
ULVAC SH-450 is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. External dimensions: W1900D1400H1800. It is kept in stock at our Kyushu Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (ULVAC) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
Power supply: 3-phase 200V, 33.2 kvA
Sputtering method: Up target
Dimensions: Φ152.4mm x t6
Number of boards to be mounted: □4”, Φ4”, Φ3”
Sub-holder for circuit board: 5 pieces/batch
Substrate electrode Φ450mm
Water-cooled turntable
RF power supply 13.56MHz
Output 2.0 kW
DC power supply 4kW
MFC (Ar, N2, O2, H2)
Attachments
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