Sputtering Equipment - Anelva E-400S
Product Specifications
Maker Anelva
Model E-400S
Category Semiconductor (Pre-process)
Model year 2007
External Dimensions W1450 D1700 H2200
Condition Used
Showroom Information
Exhibition hall Enzan Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number OA0021
Product Overview
Anelva E-400S is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. External dimensions: W1450 D1700 H2200. It is kept in stock at our Enzan Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (Anelva) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
Maximum deposition area: φ200mm
Substrate heating: Max 300℃
Target: 4 φ4 planar magnetron cathodes
Included rotary pump (adixen 2033SD)
Attached chiller: SMC (HRS024-A-20-BT)
Power supply: Three-phase AC200V 50/60Hz 100A
Attachments
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