Sputtering Equipment - Anelva E-400S
Product Specifications
Maker Anelva
Model E-400S
Category Semiconductor (Pre-process)
Model year 2007
External Dimensions W1450 D1700 H2200
Condition Used
Showroom Information
Exhibition hall Enzan Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number OA0021
Mechanical Specifications
Maximum deposition area: φ200mm
Substrate heating: Max 300℃
Target: 4 φ4 planar magnetron cathodes
Included rotary pump (adixen 2033SD)
Attached chiller: SMC (HRS024-A-20-BT)
Power supply: Three-phase AC200V 50/60Hz 100A
Attachments
Product Overview
Anelva E-400S is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. External dimensions: W1450 D1700 H2200. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Anelva) and the same category (Semiconductor (Pre-process)).
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