Sputtering Equipment - ULVAC SBH-5218R
Product Specifications
Maker ULVAC
Model SBH-5218R
Category Semiconductor (Pre-process)
Model year 2011
Condition Used
Showroom Information
Exhibition hall Enzan Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number OA0136
Product Overview
ULVAC SBH-5218R is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. It is kept in stock at our Enzan Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (ULVAC) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
Sputtering method: Side deposition
Sample size: φ3 inch/φ4 inch/W54 D5 H6mm jig
Cathode: 5 x 18 inch planar magnetron cathode
Target dimensions: 126.8x457x5mm
Configuration: Main unit/Control unit/Cryo pump/Cryo compressor/Mekabu/Rotary pump
Power supply: Three-phase AC200V 50Hz 24.8KVA
Attachments
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