Sputtering Equipment - ULVAC SBH-5218R
Product Specifications
Maker ULVAC
Model SBH-5218R
Category Semiconductor (Pre-process)
Model year 2011
Condition Used
Showroom Information
Exhibition hall Enzan Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number OA0136
Mechanical Specifications
Sputtering method: Side deposition
Sample size: φ3 inch/φ4 inch/W54 D5 H6mm jig
Cathode: 5 x 18 inch planar magnetron cathode
Target dimensions: 126.8x457x5mm
Configuration: Main unit/Control unit/Cryo pump/Cryo compressor/Mekabu/Rotary pump
Power supply: Three-phase AC200V 50Hz 24.8KVA
Attachments
Product Overview
ULVAC SBH-5218R is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (ULVAC) and the same category (Semiconductor (Pre-process)).
※ Click on the image below to zoom in.
